Multilayer aluminum wiring in semiconductor IC

ABSTRACT

A lower wiring layer is formed on an insulating film 12 covering a semiconductor substrate 10. The wiring layer 14 has a laminated structure of a barrier metal layer such as WSi2, an Al or Al alloy layer, and a cap metal layer such as WSi 2  formed in this order from the bottom. The cap metal layer is caused to contain conductive material such as Al by using an ion injection method or the like. After forming an insulating film covering the wiring layer, a contact hole is formed in the insulating film by a dry etching process using a resist layer as a mask. The dry etching process uses a fluorine based gas such as CHF 3  as the etching gas. With this etching gas, fluoride such as Al fluoride (AlF 3 ) is generated to suppress the etching of the cap metal layer.

This is a divisional application of Ser. 08/036,673, filed Mar. 25, 1993, now U.S. Pat. No. 5,399,527, issued Mar. 21, 1995.

BACKGROUND OF THE INVENTION

a) Field of the Invention

The present invention relates to a method of forming a multilayered wiring, for the manufacture of LSI or the like, and more particularly to such a method capable of preventing a cap metal layer of an under wiring Layer from being etched out completely, by forming a contact hole by a dry etching using a fluorine based etching gas after introducing a conductive material such as Al to the cap metal layer.

b) Description of the Related Art

A known conventional method of forming a multilayered wiring for LSI or the like is illustrated in FIG. 9. A lower wiring layer 2 is first formed on an insulating film 1, the lower wiring layer 2 having a laminated structure off a barrier metal layer 2a , Al or Al alloy layer 2b , and a cap metal layer 2c formed in this order from the bottom. Thereafter, an insulating film 3 is formed covering the lower wiring layer 2. A contact hole 3A is formed in the insulating film by a selective dry etching method. An upper wiring layer 4 is formed on the insulating film 3 and connected to the lower wiring layer 2 via the contact hole 3A.

The barrier metal layer 2a is used for providing a good ohmic contact with the surface of tile silicon substrate under the insulating film 1, and is made of a conductive material such as WSi₂, MoSi₂, and TiW. The barrier metal layer 2a is also used for preventing penetration of aluminum into silicon substrate during a heat treatment. The cap metal layer 2c is used for preventing a conduction defect (non-ohmic) to be caused by silicon nodules SN generated by precipitation of excessive silicon in silicide or Al alloy into the lower wiring layer 2b and filling the contact hole 3A, and is made of a conductive material such as WSi₂, MoSi₂, or TiW.

In the dry etching process of forming the contact hole 3A, a mixed gas (such as CHF₃ /He/O₂, and CF₄ /CHF₃ /Ar) containing a fluorine-based gas such as CHF₃ is used as tile etching gas.

With the above-described conventional method, if the cap metal layer 2c is made of material subjected to etching by a fluorine-based plasma gas, the cap metal layer 2c reduces its thickness and may sometimes disappear from the area just under the contact hole 3A. Under this condition, if silicon nodules are formed in tile layer 2b under the contact hole, the conduction state between the wiring layer 4 and wiring layer 2 becomes insufficient.

In order to avoid such a case, it is conceivable to form the cap metal layer 2c sufficiently thick so that this layer 2c is not etched out completely. With this method, however, there occur the following two problems. (A) The step at the wiring layer becomes great, degrading the flatness on the substrate upper surface, and (B) if the Al or Al alloy 2b is made thin corresponding in amount to the increased thickness of the cap metal layer 2c, the wiring resistivity increases because the resistivity of the cap metal is higher than the Al or Al alloy layer 2b.

Another method of eliminating such problems is to form a silicon nitride layer under the insulating film 3 as an etching stopper, as described in, for example, Japanese Patent Laid-open Publication No.2-34818. In forming the contact hole 3A in the insulating film 3, made of a thin silicon nitride layer and thick silicon oxide film, the insulating film 3 is etched first under the condition of a faster etching speed of the silicon oxide than the silicon nitride, and then under the condition of a faster etching speed of the silicon nitride than the silicon oxide. In this manner, it is possible to shorten the time while the wiring layer surface is exposed to the etching atmosphere.

With this method, however, the following problems occur. (C) The number of processes required for forming an insulating film increases, and (D) the thickness of the cap metal layer also reduces corresponding in amount to the faster etching speed of the silicon nitride at the second etching step.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a novel method of forming a multilayered wiring capable of preventing the thinning of the cap metal layer during the contact hole etching process, without the above-described disadvantages (A) to (D).

According to one aspect of the present invention, there is provided a method of forming a multilayered wiring comprising the steps of: forming a lower wiring layer on an insulating surface of a substrate, the lower wiring layer including one of an Al layer and an Al alloy layer, and a cap metal layer formed on the one layer; forming an insulating film on the insulating surface of the substrate, the insulating film covering the lower wiring layer; selectively etching the insulating film by a dry etching process using a fluorine-based gas as an etching gas, to form a contact hole at a position corresponding to a contact area of the lower wiring layer; forming an upper wiring layer on the insulating film and connecting the upper wiring layer to the lower wiring layer via the contact hole; and prior to forming tile contact hole, introducing a conductive material to the cap metal layer, the conductive material being capable of forming a fluoride acting with fluorine contained in the etching gas.

In this specification, the cap metal layer means a conductive material layer such as WSi₂, MoSi₂, and TiW formed on the Al or Al alloy layer in order to prevent insufficient conduction at the contact hole, and the cap metal layer is not limited only to the layer made of metal.

Conductive material such as Al capable of generating fluoride is contained in the cap metal layer. Therefore, when the etching starts for the cap metal layer, fluoride (such as AlF₃) is generated to suppress the etching of the cap metal layer. It is therefore easy to stop the etching before the cap metal layer is completely etched and removed.

As above, with the cap metal layer containing conductive material such as Al, the cap metal layer can be prevented from being completely removed during the contact hole etching. Accordingly, it is possible to prevent insufficient conduction to be otherwise caused by silicon nodules, improving the manufacturing yield.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1 to 6 cross sectional views explaining a method of forming a multilayered wiring according to an embodiment of the present invention.

FIG. 7 an enlarged cross sectional view showing the upper portion of the wiring material layer.

FIG. 8 is a graph showing the Al concentration distribution the upper portion of the wiring material layer.

FIG. 9 is a cross sectional view explaining a conventional method of forming a multilayered wiring.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIGS. 1 to 6 are cross sectional views explaining a method of forming a multilayered wiring according to an embodiment of the present invention. The processes (1) to (6) of this method corresponding to FIGS. 1 To 6 will be described in this order.

(1) On the surface of a semiconductor substrate 10 such as silicon, an insulating film 12 such as silicon oxide Is formed. On this insulating film 12, a barrier metal layer 14A, an Al or Al alloy layer 14B, and a cap metal layer 14C are sequentially formed in this order. The barrier metal layer 14A and cap metal layer 14C may be made of any suitable material such as WSi₂, MoSi₂, and TiW. Al or Al alloy forming the main conductive region may be generally called Al alloy.

(2) Next, Al ions are injected into the wiring layer constituted by the layers 14A to 14C to form an Al containing layer (a mixed layer of cap metal and Al) 14M near the Al or Al alloy layer 14B as shown in FIG. 7. The injection of Al ions is performed by using a source gas of AlCl₃ at a dose of at least 5 * 10¹⁵ cm⁻². The acceleration voltage at the ion injection is preferably set, as indicated by a curve N shown in FIG. 8, to the value allowing the peak of Al concentration distribution (Gaussian distribution) to position within the cap metal layer 14C. In FIGS. 7 and 8, S₁ represents the surface position of the cap metal layer 14C, S₂ represents the position exposing the Al containing layer 14M after the contact hole etching process, and S₃ represents the interface position between the Al containing layer 14M and the Al or Al alloy layer 14B.

(3) Next, the wiring layer formed by the layers 14A to 14C is patterned by a dry etching process using a resist layer 16 as the mask, to form a wiring layer 14 formed by the remaining portions 14a to 14c of the layers 14A to 14C.

(4) After removing the resist layer 16, an insulating film 18 such as silicon oxide is formed on the insulating film 12 and wiring layer 14, for example, by a plasma chemical vapor deposition method.

(5) Next, a contact hole 18A is formed in the insulating film 18 by a dry etching process using a resist layer 20 as the mask. In this dry etching process, plasma of a mixed gas (e.g., CHF₃ /O₂,CF₄ /CHF₃ /Ar, and CHF₃ /He/O₂) containing a fluorine-based gas is Used. The insulating film 18 of silicon oxide is therefore etched with highly volatile SiF₄, and removed from the substrate upper surface.

In contrast, when Al is etched with the fluorine-based gas, Al fluoride (AlF₃) having a low vapor pressure is generated and it suppresses the etching process. The etching speeds were measured for an SiO₂ film (deposited by a plasma CVD method), an Al-1% Si-0.5% Cu alloy layer, and a WSi₂, layer, by using a narrow gap reactive ion etching apparatus, under the conditions of CHF₃ /He/O₂ =20/88/3.5 sccm, pressure 260 Pa, and RF power 500 W. The measurement results are given in the following table.

    ______________________________________                                         Etched       Etching        Selection                                          Material     Speed (nm/min.)                                                                               Ratio                                              ______________________________________                                         SiO.sub.2    V.sub.1 = 422.5                                                   Al--Si--Cu   V.sub.2 = 1.04 V.sub.1 /V.sub.2 = 411                             WSi.sub.2    V.sub.3 = 30.0 V.sub.1 /V.sub.3 = 14.1                            ______________________________________                                    

The etching speed for Al-Si-Cu is very slow, and the selection ratio V₁ /V₂ between SiO₂ and Al-Si-Cu is very high. The etching surface of the cap metal layer 14C containing Al is covered with AlF₃, so that the etching selection ratio relative to the insulating film 18 made of silicon oxide is greatly improved and the etching is easily stopped at the position S2 shown in FIG. 7. Namely, the Al containing layer 14M is left just under the contact hole 18A and operates like the cap metal. It is therefore possible to prevent conduction defect to be otherwise caused by silicon nodules in the contact hole.

A change of the etching speed for WSi₂, relative to the Al injection amount, and a change of the selection ratio relative to a silicon oxide film formed by plasma, were measured, using a source gas AlCl₃. The results are given in the following table.

    ______________________________________                                         Al+ Injection                                                                            Acceleration                                                                               WSi.sub.2 Etching                                                                           Selection                                   Amount (cm.sup.-2)                                                                       Voltage (kV)                                                                               Speed (A/min)                                                                               Ratio                                       ______________________________________                                         0                     290.8        13.9                                        5 * 10.sup.13                                                                            60          293.4        13.8                                                  100         290.2        13.9                                        5 * 10.sup.15                                                                            60          283.8        14.2                                                  100         275.2        14.7                                        ______________________________________                                    

As seen from this table, the etching speed lowers at the Al ion injection amount of 5*10¹⁵ cm⁻² or more. It is therefore necessary to use Al ions of 5*10¹⁵ cm⁻² or more.

(6) Thereafter, wiring material such as Al and Al alloy is deposited and patterned to form an upper wiring layer 22 on the substrate upper surface which layer is connected to the lower wiring layer 14 via the contact hole 18A. In the present embodiment, the Al containing layer 14M remains on the cap metal layer 14C, thus the Al containing layer 14M and the cap metal layer 14C function as a conductive bypass layer against electrical disconnection between the wiring layer 22 and 14 caused by silicon nodules SN.

The present invention is not limited only to the above embodiment. For example, the injection of Al ions may be performed after forming the wiring layer 14 at the process shown in FIG. 3. Furthermore, Al may be contained in the cap metal layer 14C by means of a sputtering process or the like. Still further, conductive material to be contained in the cap metal layer is not limited to Al, but other materials capable of forming fluoride (particularly fluoride having a low vapor pressure) such as Cr, Sr, Ti, Cu, Ni, and Mg may also be used. For ion injection, Cr and Ti are preferable. For the injection of Cr ions and Ti ions, CrC₄, CrO₂ C₂, TiCl₄ for example may be used as the source gas. 

I claim:
 1. A wiring structure used in a semiconductor device, comprising:a substrate including a semiconductor substrate and an insulating layer formed thereon; and a multilayered wiring layer formed on the substrate, including:a first metal layer formed on the substrate, wherein the first metal layer serves as a barrier metal layer; a second metal layer formed on the first metal layer, wherein the second metal layer serves as a main conduction path within the multilayered wiring layer; and a third metal layer formed on the second metal layer that prevents the formation of defects in the second metal layer, wherein a metal substance different from the third metal is present in the third metal layer in a distribution having a concentration which increases toward an interface with the second metal layer, wherein the metal substance is chosen so that if the third metal layer is exposed to a plasma including a fluorine-based gas, the metal substance vapor pressure fluoride.
 2. A wiring structure according to claim 1, wherein a primary constituent of the second metal layer is the same as the metal substance distributed in the third metal layer.
 3. A wiring structure according to claim 1, wherein the metal substance distributed in the third metal layer is aluminum.
 4. A wiring structure according to claim 1, wherein the first metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 5. A wiring structure according to claim 1, wherein the second metal layer comprises at least one material selected from a group consisting of aluminum and aluminum alloy.
 6. A wiring structure according to claim 1, wherein the third metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 7. A wiring structure according to claim 1, wherein the first and third metal layers comprise the same metal substance.
 8. A wiring structure according to claim 1, wherein the metal substance distributed in the third metal layer is introduced to the third metal layer by injecting ions of aluminum.
 9. A wiring structure according to claim 8, wherein an amount of aluminum injected is 5×10¹⁵ cm⁻² or more.
 10. A wiring structure used in a semiconductor device, comprising:a substrate including a semiconductor substrate and an insulator formed thereon; and a multilayered wiring layer formed on the substrate, including:a barrier metal layer formed on the substrate; an aluminum-based metal layer formed on the barrier metal layer and serving as a main conduction path; and a cap metal layer formed on the aluminum-based metal layer that prevents the formation of defects in the aluminum-based metal layer, wherein aluminum is present in the cap metal layer in a distribution having a concentration which increases toward an interface with the aluminum-based metal layer.
 11. A wiring structure according to claim 10, wherein the barrier metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 12. A wiring structure according to claim 10, wherein the cap metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 13. A wiring structure according to claim 10, wherein the aluminum present the cap metal layer is introduced into the cap metal layer by injecting ions of aluminum.
 14. A wiring structure according to claim 13, wherein an amount of aluminum injected is 5×10¹⁵ cm⁻² or more.
 15. A wiring structure used for interconnection in a semiconductor device, comprising:(a) a semiconductor substrate; (b) an insulating layer formed over the semiconductor substrate; (c) a lower wiring layer formed over the semiconductor substrate, including:(c-1) a first metal layer formed over the semiconductor substrate, (c-2) a second metal layer formed on the first metal layer for a main conduction path, and (c-3) a third metal layer formed on the second metal layer, wherein a substance different from the third metal is present in the third metal layer in a distribution having a concentration which increases toward an interface with the second metal layer, wherein the substance reacts in the presence of a plasma including a fluorine-based gas to form a fluoride having a low vapor pressure; and (d) an upper wiring layer formed over the lower wiring layer, wherein the upper wiring layer is connected to the lower wiring layer through the insulating layer.
 16. A wiring structure according to claim 15, wherein the first metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 17. A wiring structure according to claim 15, wherein the second metal layer comprises at least one material selected from a group consisting of aluminum and aluminum alloy.
 18. A wiring structure according to claim 15, wherein the third metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 19. A wiring structure according to claim 15, wherein the substance present in the distribution in the third metal layer is aluminum.
 20. A wiring structure according to claim 19, wherein the aluminum present in the third metal layer represents aluminum ion injected at 5×10¹⁵ cm⁻² or more.
 21. A wiring structure according to claim 15, wherein the upper wiring layer comprises at least one material selected from a group consisting of aluminum and aluminum alloy.
 22. A wiring structure according to claim 15, wherein the insulating layer comprises silicon oxide.
 23. A wiring structure comprising:a substrate including a semiconductor substrate and an insulating layer formed thereon; and a multilayered wiring layer formed over the substrate, including:a first metal layer which serves as a main conduction path within the multilayered wiring layer; and a second metal layer formed on the first metal layer to prevent the formation of defects in the first metal layer, wherein a metal substance different from the second metal is present in the second metal layer in a distribution having a concentration which increases toward an interface with the first metal layer, and wherein the metal substance has the property that if the second metal layer is exposed to a plasma including a fluorine-based gas, the metal substance reacts to form a low vapor pressure fluoride.
 24. A wiring structure according to claim 23, wherein the first metal layer comprises at least one material selected from a group consisting of aluminum and aluminum alloy.
 25. A wiring structure according to claim 24, wherein the second metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 26. A wiring structure according to claim 25, wherein the metal substance is aluminum.
 27. A wiring structure according to claim 23, wherein the metal substance includes at least one constituent selected from the group of Al, Cr, Sr, Cu, Ni, Mg and Ti.
 28. A wiring structure according to claim 23, wherein the metal substance is distributed within the second metal layer so as to have a peak concentration within the second metal layer.
 29. A wiring structure according to claim 1, wherein the metal substance includes at least one constituent selected from the group of Al, Cr, Sr, Cu, Ni, Mg and Ti.
 30. A wiring structure according to claim 15, wherein the substance present in the distribution in the third metal layer includes at least one constituent selected from the group of Al, Cr, Sr, Cu, Ni, Mg and Ti.
 31. A wiring structure according to claim 1, wherein the metal substance is distributed within the third metal layer so as to have a peak concentration within the third metal layer.
 32. A wiring structure according to claim 10, wherein the aluminum is distributed within the cap metal layer so as to have a peak concentration within the cap metal layer.
 33. A wiring structure according to claim 15, wherein the metal substance is distributed within the third metal layer so as to have a peak concentration within the third metal layer.
 34. A wiring structure according to claim 26, wherein the aluminum present in the second metal layer represents aluminum ion injected at 5×10¹⁵ cm⁻² or more.
 35. A wiring structure comprising:a substrate including a semiconductor substrate and an insulating layer formed thereon; and a multilayered wiring layer formed over the substrate, including:a first metal layer which serves as a main conduction path within the multilayered wiring layer; and a second metal layer formed on the first metal layer to prevent the formation of defects in the first metal layer when the second metal layer is exposed to a plasma including a fluorine-based gas, wherein a metal substance different from the second metal is present in the second metal layer in a distribution having a concentration which increases toward an interface with the first metal layer.
 36. A wiring structure according to claim 35, wherein the first metal layer comprises at least one material selected from a group consisting of aluminum and aluminum alloy.
 37. A wiring structure according to claim 36, wherein the second metal layer comprises at least one material selected from a group consisting of WSi₂, MoSi₂ and TiW.
 38. A wiring structure according to claim 37, wherein the metal substance is aluminum.
 39. A wiring structure according to claim 38, wherein the aluminum present in the second metal layer represents aluminum ion injected at 5×10¹⁵ cm⁻² or more.
 40. A wiring structure according to claim 35, wherein the metal substance includes at least one constituent selected from the group of Al, Cr, Sr, Cu, Ni, Mg and Ti.
 41. A wiring structure according to claim 35, wherein the metal substance is distributed within the second metal layer so as to have a peak concentration within the second metal layer. 